Machining of three-dimensional microstructures in silicon by electro-discharge machining

Currently, nearly all microcomponents are fabricated by microelectronic production technologies like etching, deposition or other photolithographic techniques. In this way, the main emphasis has been put on surface micromechanics. The major challenge for the future will be the development of real th...

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Bibliographic Details
Published in:Sensors and actuators. A, Physical Physical, 1998-05, Vol.67 (1), p.159-165
Main Authors: Reynaerts, Dominiek, Meeusen, Wim, Van Brussel, Hendrik
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Electric discharges
Electro-discharge machining
Exact sciences and technology
Laboratory procedures
Machining, milling
Materials science
Materials synthesis
materials processing
Metrology, measurements and laboratory procedures
Microelectromechanical system (MEMS)
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Silicon micromachining
Workshop procedures (welding, machining, lubrication, bearings, etc.)
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Summary:Currently, nearly all microcomponents are fabricated by microelectronic production technologies like etching, deposition or other photolithographic techniques. In this way, the main emphasis has been put on surface micromechanics. The major challenge for the future will be the development of real three-dimensional microstructures. Electro-discharge machining (EDM) is a so-called non-conventional machining technique, whereby material is removed through the erosive action of electrical discharges (sparks) provided by a generator. As shown in this paper, EDM proves to be a versatile technique that is very well suited for machining complex microstructures. Several examples, especially microparts with three-dimensional features, are given. It is demonstrated that the EDM process is independent on the silicon crystal orientation. This means that a wafer can be machined in any direction with respect to the wafer's top plane. EDM, unlike most micromachining processes, is not a batch process. On the other hand, is it well situated to be used as a rapid prototyping technique or for machining complex parts.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(97)01724-X