Thermal flow sensor for liquids and gases based on combinations of two principles

A new type of a flow sensor is presented which is based on a thermal principle. The combination of two detecting methods results both in a considerable increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction time of less than 2 ms. Furthermore, the sensor is relatively insensitive to...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1999-03, Vol.73 (1), p.7-13
Main Authors: Ashauer, M., Glosch, H., Hedrich, F., Hey, N., Sandmaier, H., Lang, W.
Format: Article
Language:English
Subjects:
Anemometer
Thermal flow sensor
Thermal time-of-flight
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Summary:A new type of a flow sensor is presented which is based on a thermal principle. The combination of two detecting methods results both in a considerable increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction time of less than 2 ms. Furthermore, the sensor is relatively insensitive to pollution. Devices were manufactured and successfully tested for liquids and gases.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(98)00248-9