Numerical simulation of multiterminal silicon piezoelements

For optimization of the design of multiterminal silicon single piezoelements with an arbitrary layout, we have proposed a two-dimensional mathematical model based on a boundary value problem. The model takes into account the impact of external resistive circuits on the sensitivity and output voltage...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1998-02, Vol.65 (1), p.5-9
Main Authors: Gridchin, V.A., Pirogova, R.A.
Format: Article
Language:English
Subjects:
Boundary value problems
Mathematical models
Multiterminal single piezoelements
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Summary:For optimization of the design of multiterminal silicon single piezoelements with an arbitrary layout, we have proposed a two-dimensional mathematical model based on a boundary value problem. The model takes into account the impact of external resistive circuits on the sensitivity and output voltage. This model is considered for piezoelements situated in a field of uniform mechanical stress. The accuracy of the model is proven by an agreement between the numerical simulation results, the closed-form ones and the experimental data. By simulation, the dependence of the sensitivity change on the change of the output voltage of four-terminal silicon single piezoelements due to connecting external circuits is found. The results are compared with experimental data obtained for the fabricated pressure sensors.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(98)80001-0