Characterization of the anisotropic chemical attack of {hk0} silicon plates in a T.M.A.H. solution

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1999-10, Vol.77 (2), p.81-97
Main Authors: Charbonnieras, A.R., Tellier, C.R.
Format: Article
Language:English
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ISSN:0924-4247
DOI:10.1016/S0924-4247(99)00020-5