A new thin-film humidity and thermal micro-sensor with Al/SrNbxTi1-xO3/SiO2/Si structure

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1999-05, Vol.75 (1), p.70-74
Main Authors: LI, G. O, LAI, P. T, ZENG, S. H, HUANG, M. Q, LI, B
Format: Article
Language:English
Subjects:
Exact sciences and technology
General equipment and techniques
Hygrometers
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
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ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(99)00052-7