Micro-stereolithography of polymeric and ceramic microstructures

Micro-stereolithography (μSL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced μSL apparatus is designed and developed which includes an Ar + laser, the beam delivery system, comp...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1999-10, Vol.77 (2), p.149-156
Main Authors: Zhang, X, Jiang, X.N, Sun, C
Format: Article
Language:English
Subjects:
Ceramics
MEMS
Microfabrication
Micromachining
Polymer
Stereolithography
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Summary:Micro-stereolithography (μSL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced μSL apparatus is designed and developed which includes an Ar + laser, the beam delivery system, computer-controlled precision x–y–z stages and CAD design tool, and in situ process monitoring systems. The 1.2 μm resolution of μSL fabrication has been achieved with this apparatus. The microtubes with high aspect ratio of 16 and real 3D microchannels and microcones are fabricated on silicon substrate. For the first time, μSL of ceramic microgears has been successfully demonstrated.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(99)00189-2