A study on micromachined bimetallic actuation

This paper presents a theoretical and experimental study of bimetallic actuation in micro-electro-mechanical systems (MEMS). The finite element method (FEM) has been used to predict and optimize the performance of bimetallic membranes, including maximum deflection, actuation force under definite tem...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1999-12, Vol.78 (2), p.212-219
Main Authors: Zou, Quanbo, Sridhar, Uppili, Lin, Rongming
Format: Article
Language:English
Subjects:
Bimetallic actuation
Finite element method (FEM)
Heat transfer analysis
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Summary:This paper presents a theoretical and experimental study of bimetallic actuation in micro-electro-mechanical systems (MEMS). The finite element method (FEM) has been used to predict and optimize the performance of bimetallic membranes, including maximum deflection, actuation force under definite temperature load, and their natural frequencies with fluidic (air or liquid) damping. The study involves micromachined pumps, valves and some other structures. Heat transfer analysis is also conducted to evaluate the temperature field distribution and the transient behavior of the microstructures. Some structures have been obtained for high displacements under low driving power, and also for quick response of bimetallic pumps. The results show that the experiments agree well with theoretical predictions.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(99)00236-8