Micromachined metal oxide gas sensors: opportunities to improve sensor performance

This review deals with gas sensors combining a metal oxide based sensing layer and a substrate realized by using micromachining. It starts by giving an overview of the design principles and technology involved in the fabrication of micromachined substrates examining thermal and mechanical aspects. B...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2001-02, Vol.73 (1), p.1-26
Main Authors: Simon, Isolde, Bârsan, Nicolae, Bauer, Michael, Weimar, Udo
Format: Article
Language:English
Subjects:
Metal oxide
Micro gas sensors
Micromachining
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Summary:This review deals with gas sensors combining a metal oxide based sensing layer and a substrate realized by using micromachining. It starts by giving an overview of the design principles and technology involved in the fabrication of micromachined substrates examining thermal and mechanical aspects. Both kinds of micromachined substrates, closed-membrane-type and the suspended-membrane-type, are discussed. The deposition of the sensing layer is complicated by the mechanical fragility of the micromachined substrates. Different approaches used for the formation of the sensing layer such as thin film and thick film deposition techniques are reviewed. Finally, the gas sensing function of the sensitive layer is analyzed and various ways for extracting the information are presented with respect to the improvement of sensor performance brought by this new approach.
ISSN:0925-4005
1873-3077
DOI:10.1016/S0925-4005(00)00639-0