Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate

We report on the design, implementation and characterisation of a thick-film gas sensor deposited for the first time by screen-printing technique onto a micromachined hotplate, the microheater maintains a film temperature as high as 400°C with

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2001-06, Vol.77 (1), p.95-99
Main Authors: Vincenzi, D, Butturi, M.A, Guidi, V, Carotta, M.C, Martinelli, G, Guarnieri, V, Brida, S, Margesin, B, Giacomozzi, F, Zen, M, Pignatel, G.U, Vasiliev, A.A, Pisliakov, A.V
Format: Article
Language:English
Subjects:
Gas sensor
Power
Screen-printing
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Summary:We report on the design, implementation and characterisation of a thick-film gas sensor deposited for the first time by screen-printing technique onto a micromachined hotplate, the microheater maintains a film temperature as high as 400°C with
ISSN:0925-4005
1873-3077
DOI:10.1016/S0925-4005(01)00679-7