A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector

A design is presented for a micromachined differential viscometer, that is suitable for integration into a planar hydrodynamic chromatography system (HDC) for polymer analysis. The viscometer consists of four equal flow restrictions and two pressure sensors, connected in a Wheatstone bridge configur...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2003-07, Vol.92 (1), p.102-109
Main Authors: van der Heyden, F.H.J., Blom, M.T., Gardeniers, J.G.E., Chmela, E., Elwenspoek, M., Tijssen, R., van den Berg, A.
Format: Article
Language:English
Subjects:
Integrated differential viscosity detection
Low hydraulic capacitance pressure sensor
Optical sensing
Polymer analysis
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Summary:A design is presented for a micromachined differential viscometer, that is suitable for integration into a planar hydrodynamic chromatography system (HDC) for polymer analysis. The viscometer consists of four equal flow restrictions and two pressure sensors, connected in a Wheatstone bridge configuration. Since this viscometer requires an ultra-low hydraulic capacitance differential pressure sensor, a pressure sensor is presented of which the internal volume displacement was reduced considerably compared to commercially available sensors. An optical method was used to detect membrane deflections with a magnitude of approximately 0.01 nm. This method lead to a linearity of 1% over the measured pressure range and a resolution of 2 Pa. With this pressure sensor integrated into the viscosity detector, viscosity measurements were performed on the viscosity difference of ethanol and water.
ISSN:0925-4005
1873-3077
DOI:10.1016/S0925-4005(03)00099-6