Fabrication and evaluation of thin-film solid-state sensors for hydrogen sulfide detection

Thin-film tungsten oxide sensors were fabricated by using metal-organic deposition (MOD) processes. Suitable tungsten carboxylate compounds were synthesized and used as precursor materials for the thin-films of tungsten oxide. The sensors were incorporated into a vacuum line as a new method of evalu...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 1998-12, Vol.53 (3), p.155-162
Main Authors: Royster, Jr, Tommie L., Chatterjee, Dilip, Paz-Pujalt, Gustavo R., Marrese, Carl A.
Format: Article
Language:English
Subjects:
Aqueous solutions
Carboxylate
Tungsten
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Summary:Thin-film tungsten oxide sensors were fabricated by using metal-organic deposition (MOD) processes. Suitable tungsten carboxylate compounds were synthesized and used as precursor materials for the thin-films of tungsten oxide. The sensors were incorporated into a vacuum line as a new method of evaluation. Operation of the sensors under these conditions proved to be a useful way of providing a very sensitive, reproducible and stable system for measurement of low-level hydrogen sulfide evolved from aqueous solutions.
ISSN:0925-4005
1873-3077
DOI:10.1016/S0925-4005(98)00312-8