The CVD growth of micro crystals of diamond

Hot filament CVD method can be used to grow micron-sized diamond crystals of several millions per square centimeter. These crystals possess fully developed facets. Such euhedral diamond crystals of uniform size may not scratch workpieces. Moreover, the smooth surfaces can minimize the adhered impuri...

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Bibliographic Details
Published in:Diamond and related materials 2001-09, Vol.10 (9), p.1584-1587
Main Authors: Chung, Hsiao-Kuo, Sung, James C.
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
CVD diamond
Exact sciences and technology
Growth from vapor
Materials science
Methods of crystal growth
physics of crystal growth
Micro diamond
Physics
Polishing
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Summary:Hot filament CVD method can be used to grow micron-sized diamond crystals of several millions per square centimeter. These crystals possess fully developed facets. Such euhedral diamond crystals of uniform size may not scratch workpieces. Moreover, the smooth surfaces can minimize the adhered impurities, therefore the contamination of products may be avoided. They are the ideal superabrasives for polishing high valued materials such as semiconductors.
ISSN:0925-9635
1879-0062
DOI:10.1016/S0925-9635(01)00413-7