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Magnetoresistance of boron-doped chemical vapor deposition polycrystalline diamond films
The electrical properties and magnetoresistance of boron-doped polycrystalline diamond films grown on p-typed Si (100) by hot filament chemical vapor deposition have been investigated. As the atomic boron concentration increases from 3×10 17 to 3×10 19 cm −3, and grain size from 5 to 15 μm, the qual...
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Published in: | Diamond and related materials 2002, Vol.11 (1), p.49-52 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The electrical properties and magnetoresistance of boron-doped polycrystalline diamond films grown on p-typed Si (100) by hot filament chemical vapor deposition have been investigated. As the atomic boron concentration increases from 3×10
17 to 3×10
19 cm
−3, and grain size from 5 to 15 μm, the quality of diamond is improved, which causes the carrier mobility μ and longitudinal magnetoresistance change rate Δρ
///ρ
0 to increase. For a magnetic field (
B) of 20 tesla and temperature 300 K, the longitudinal resistance change rate Δρ
///ρ
0 is up to 20%. Meanwhile, Δρ
///ρ
0 is proportional to μ
2
B
2 in a low field and proportional to μ
1.5
B in a high field. It is the first time that a result is obtained in a high field. |
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ISSN: | 0925-9635 1879-0062 |
DOI: | 10.1016/S0925-9635(01)00516-7 |