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Magnetoresistance of boron-doped chemical vapor deposition polycrystalline diamond films

The electrical properties and magnetoresistance of boron-doped polycrystalline diamond films grown on p-typed Si (100) by hot filament chemical vapor deposition have been investigated. As the atomic boron concentration increases from 3×10 17 to 3×10 19 cm −3, and grain size from 5 to 15 μm, the qual...

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Bibliographic Details
Published in:Diamond and related materials 2002, Vol.11 (1), p.49-52
Main Authors: Fei, Y.J, Yang, D, Wang, Xue, Meng, Q.B, Wang, Xuejin, Xiong, Y.Y, Nie, Y.X, Feng, Ke-an
Format: Article
Language:English
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Summary:The electrical properties and magnetoresistance of boron-doped polycrystalline diamond films grown on p-typed Si (100) by hot filament chemical vapor deposition have been investigated. As the atomic boron concentration increases from 3×10 17 to 3×10 19 cm −3, and grain size from 5 to 15 μm, the quality of diamond is improved, which causes the carrier mobility μ and longitudinal magnetoresistance change rate Δρ ///ρ 0 to increase. For a magnetic field ( B) of 20 tesla and temperature 300 K, the longitudinal resistance change rate Δρ ///ρ 0 is up to 20%. Meanwhile, Δρ ///ρ 0 is proportional to μ 2 B 2 in a low field and proportional to μ 1.5 B in a high field. It is the first time that a result is obtained in a high field.
ISSN:0925-9635
1879-0062
DOI:10.1016/S0925-9635(01)00516-7