Growth of carbon nanotubes with anodic aluminum oxide formed on the catalytic metal-coated Si substrate

In order to improve the selectivity and uniformity of carbon nanotubes (CNTs), we have examined growth of CNTs on a porous alumina template. Well-ordered, nano-sized pores were fabricated on a Si substrate using an anodic oxidation method. CNTs were grown on the well-ordered anodic aluminum oxide te...

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Bibliographic Details
Published in:Diamond and related materials 2003-03, Vol.12 (3), p.870-873
Main Authors: Kim, Mun Ja, Lee, Tae Young, Choi, Jong Hyong, Park, Jong Bae, Seung Lee, Jin, Kim, Seong Kyu, Yoo, Ji-Beom, Park, Chong-Yun
Format: Article
Language:English
Subjects:
AAO/Si
Anodic aluminum oxide (AAO)
Carbon nanotubes, PECVD
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Nanoscale materials and structures: fabrication and characterization
Physics
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Summary:In order to improve the selectivity and uniformity of carbon nanotubes (CNTs), we have examined growth of CNTs on a porous alumina template. Well-ordered, nano-sized pores were fabricated on a Si substrate using an anodic oxidation method. CNTs were grown on the well-ordered anodic aluminum oxide template, which was formed on the Si substrate using plasma enhanced chemical vapor deposition with acetylene. With the catalytic metal at the bottom of the anodic aluminum oxide template, CNTs were grown within a nano-channel of the alumina template at 550 °C.
ISSN:0925-9635
1879-0062
DOI:10.1016/S0925-9635(02)00364-3