PECVD of hydrogenated diamond-like carbon films from CH4–Ar mixtures: growth chemistry and material characteristics

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Bibliographic Details
Published in:Diamond and related materials 2003-12
Main Author: Cicala, G
Format: Article
Language:English
Online Access:Get full text
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ISSN:0925-9635
DOI:10.1016/S0925-9635(03)00448-5