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Surface vacancies in CVD diamond

Investigation of unpolished, high-quality chemical vapour deposition diamond films has revealed a significant concentration of vacancies within a few microns of the surface, but not in the bulk. Modelling of the growth, diffusion and trapping of vacancies shows that this arises from the growth of va...

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Bibliographic Details
Published in:Diamond and related materials 1998-02, Vol.7 (2), p.261-265
Main Authors: Allers, Lars, Mainwood, Alison
Format: Article
Language:English
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Summary:Investigation of unpolished, high-quality chemical vapour deposition diamond films has revealed a significant concentration of vacancies within a few microns of the surface, but not in the bulk. Modelling of the growth, diffusion and trapping of vacancies shows that this arises from the growth of vacancies into the surface of the diamond and their subsequent migration and trapping as growth proceeds. Because the temperature at which the vacancies migrate is comparable with that of diamond growth, a unique situation arises: the lattice defects created during growth persist in the crystals.
ISSN:0925-9635
1879-0062
DOI:10.1016/S0925-9635(97)00267-7