Investigation of ultrathin DLC film growth by a novel X-ray reflectivity technique and in situ ellipsometry

The results of the investigation of growth processes of diamond-like carbon films by in situ and ex situ X-ray monitoring of reflectivity at the wavelength 1.54 Å are presented. Diamond-like carbon films were obtained by RF-plasma-enhanced chemical vapour deposition. The growth rate, thickness, dens...

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Bibliographic Details
Published in:Diamond and related materials 1999-03, Vol.8 (2), p.532-537
Main Authors: Kondrashov, P.E., Smirnov, I.S., Lukashov, Y.E., Yablokov, S.Yu, Baranov, A.M., Dowling, D.P., Donnelly, K., Flood, R.V., McConnell, M.L.
Format: Article
Language:English
Subjects:
DLC
Ellipsometry
In situ monitoring
X-ray reflectivity
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Summary:The results of the investigation of growth processes of diamond-like carbon films by in situ and ex situ X-ray monitoring of reflectivity at the wavelength 1.54 Å are presented. Diamond-like carbon films were obtained by RF-plasma-enhanced chemical vapour deposition. The growth rate, thickness, density and roughness of films were calculated from the time dependence of reflectivity during deposition process.
ISSN:0925-9635
1879-0062
DOI:10.1016/S0925-9635(98)00405-1