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Study on the gas phase HBr-catalyzed reaction between UF6 and SiH4 at room temperature

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Bibliographic Details
Published in:Applied catalysis. A, General General, 1998-01, Vol.166 (1), p.L1-L3
Main Authors: XU, B.-Y, HU, J.-X
Format: Article
Language:English
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ISSN:0926-860X
1873-3875
DOI:10.1016/S0926-860X(97)00267-6