Temperature control in a crystal growth process by μ-synthesis

This study aims at improving the performance of a crystal growth process by using thermal gradient control during the crystal growth. This paper describes the design of a two-degree-of-freedom control system with the μ-synthesis technique. The main purpose of the control system is to achieve robust...

Full description

Saved in:
Bibliographic Details
Published in:Control engineering practice 1997-11, Vol.5 (11), p.1563-1571
Main Authors: Poinard, F., Métrat, G., Irving, E.
Format: Article
Language:English
Subjects:
Crystal growth processes
Robust performance
Two-degree-of-freedom controllers
μ-synthesis
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This study aims at improving the performance of a crystal growth process by using thermal gradient control during the crystal growth. This paper describes the design of a two-degree-of-freedom control system with the μ-synthesis technique. The main purpose of the control system is to achieve robust performance. This performance includes regulation and tracking objectives. The controller has been implemented and evaluated. By means of various experiments, it has been confirmed that the desired robust performance is achieved by the closed-loop system.
ISSN:0967-0661
1873-6939
DOI:10.1016/S0967-0661(97)10010-7