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Doubleside polishing—a technology mandatory for 300mm wafer manufacturing
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Published in: | Materials science in semiconductor processing 2002-08, Vol.5 (4-5), p.375-380 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 1369-8001 |
DOI: | 10.1016/S1369-8001(02)00125-7 |