{311} Defect evolution in Si-implanted Si1−xGex alloys

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Bibliographic Details
Published in:Materials science in semiconductor processing 2003-08, Vol.6 (4), p.205-208
Main Authors: Crosby, Robert T., Jones, Kevin S., Law, Mark E., Larsen, A.Nylandsted, Hansen, J.Lundsgaard
Format: Article
Language:English
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ISSN:1369-8001
DOI:10.1016/S1369-8001(03)00087-8