SR-PES and STM observation of metastable chemisorption state of oxygen on Si(1 1 0)-16 × 2 surface

Initial adsorption of oxygen molecules on the Si(1 1 0)-16 × 2 surface and subsequent modification of the bonding states induced by mild (300 °C) annealing have been studied by synchrotron-radiation photoemission spectroscopy and scanning-tunneling microscopy. It has been shown that upon annealing,...

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Bibliographic Details
Published in:Applied surface science 2008-07, Vol.254 (19), p.6232-6234
Main Authors: Yamamoto, Yoshihisa, Togashi, Hideaki, Kato, Atsushi, Takahashi, Yuya, Konno, Atsushi, Teraoka, Yuden, Yoshigoe, Akitaka, Asaoka, Hidehito, Suemitsu, Maki
Format: Article
Language:English
Subjects:
Adsorbate structure
Dry oxidation
Si surface
Thermal stability
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Summary:Initial adsorption of oxygen molecules on the Si(1 1 0)-16 × 2 surface and subsequent modification of the bonding states induced by mild (300 °C) annealing have been studied by synchrotron-radiation photoemission spectroscopy and scanning-tunneling microscopy. It has been shown that upon annealing, the intensity and the energy positions of the Si 2p suboxide components shift towards the values characteristic for the thermal oxide. This indicates the presence of a metastable chemisorption state of oxygen on the Si(1 1 0)-16 × 2 surface.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2008.02.148