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Surface plasmon resonance detection using amorphous carbon/Au multilayer structure
Surface plasmon resonance (SPR) can be used to detect the change in reflective index on a metal surface. In this report, we propose detection of the SPR can easily be applied to estimate the thickness of the amorphous carbon ( a-C:H) films. To detect changes in film thickness using SPR, devices with...
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Published in: | Applied surface science 2009-11, Vol.256 (4), p.1236-1239 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Surface plasmon resonance (SPR) can be used to detect the change in reflective index on a metal surface. In this report, we propose detection of the SPR can easily be applied to estimate the thickness of the amorphous carbon (
a-C:H) films. To detect changes in film thickness using SPR, devices with an
a-C:H/Au structure were fabricated. The
a-C:H films were deposited by electron cyclotron resonance plasma chemical vapor deposition (ECR-CVD) and sputtering, and the obtained film densities were 1.4 and 1.6
g/cm
3, respectively. By the deposition of an 11-nm thick
a-C:H film on a Au layer by sputtering, the SPR angle changed from 44.90° to 47.05°. For
a-C:H deposited by ECR-CVD, the SPR angle was shifted from 44.24° for Au without the
a-C:H layer to 58.44° after deposition of 45
nm thick
a-C:H film. In both systems of the SPR angle increased with increasing the film thickness. The rate at which the SPR angle shifted depended on the
a-C:H film density. These results show that the thickness of an
a-C:H film can be determined by the SPR angle shift on an
a-C:H layer using
a-C:H/Au device with an
a-C:H film of the same density. |
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ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/j.apsusc.2009.05.125 |