Effect of Mn doping on the nanostructure and optical properties of ZnO films synthesized by magnetron sputtering

• Published in: Applied surface science 2010-01, Vol.256 (7), p.2259-2262
• Main Authors: Wu, Z.F., Wu, X.M., Zhuge, L.J., Hong, B., Yang, X.M., Yu, T., He, J.J., Chen, Q.
• Format: Article
• Language: English
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Mn doping; Nanostructure; Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity); Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity; Optical properties; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Physics; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; ZnO
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2009.10.049

We investigated the microstructure and optical properties of Zn 1− x Mn x O films synthesized by the magnetron sputtering technique. Structural analyses suggest that Mn occupied the Zn sites successfully and did not change the wurtzite structure of ZnO. In addition, nanoscale columnar grain arrays were found in the Mn-doped ZnO films. The experimental results indicate that moderate Mn doping could enhance the photoluminescence emission of ZnO. The possible origin of the emissions from our samples was also explored.