Characterization and properties of ZnO1-xSx alloy films fabricated by radio-frequency magnetron sputtering

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Bibliographic Details
Published in:Applied surface science 2010-05, Vol.256 (14), p.4621-4625
Main Authors: PAN, H. L, YANG, T, YAO, B, DENG, R, SUI, R. Y, GAO, L. L, SHEN, D. Z
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Physics
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ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2010.02.061