Substrate temperature influence on W/WCNx bilayers grown by pulsed vacuum arc discharge

• Published in: Applied surface science 2012-04, Vol.258 (12), p.5100-5104
• Main Authors: Ospina, R., Escobar, D., Restrepo-Parra, E., Arango, P.J., Jurado, J.F.
• Format: Article
• Language: English
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; EDS; Exact sciences and technology; Morphology; Physics; Raman; Structure; Tungsten; XRD
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2012.01.137

► WCN coatings present C and N concentration competition depending on the process production parameters as the substrate temperature. ► WCN coatings studied by means of Raman spectroscopy showed D and G bands corresponding to an amorphous component. ► The increase in the carbon inclusion in the WCN lattice produces an increment in the amorphous component. W/WCNx coatings were produced by using a repetitive pulsed vacuum arc discharge on stainless-steel 304 substrates, varying the substrate temperature from room temperature to 200°C. Energy dispersive spectroscopy (EDS) was used for determining W, C and N concentrations dependence on the substrate temperature. A competition between C and N can be observed. Atomic force microscopy was employed for obtaining the thickness and grain size that present similar tendencies as a function of the temperature. X-ray diffraction characterization showed phases of W and α-WCN (hexagonal). Raman spectra for all substrate temperatures were obtained, presenting two peaks corresponding to D (disorder) and G (graphite) bands in the region of 1100–1700cm−1 due to the amorphous carbon. As an important conclusion, it was stated that substrate temperature has strong influence on the structure, chemical composition and morphology of W/WCNx bilayers, caused by the competition between carbon and nitrogen.