The effect of deposition atmosphere on the chemical composition of TiN and ZrN thin films grown by pulsed laser deposition

•TiN and ZrN films were grown by pulsed laser deposition.•XPS results indicated that films contain C atoms bonded into metallic carbide.•Films containing carbon exhibited higher hardness values. Very thin TiN and ZrN films (

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Bibliographic Details
Published in:Applied surface science 2014-05, Vol.302, p.124-128
Main Authors: Craciun, D., Socol, G., Stefan, N., Dorcioman, G., Hanna, M., Taylor, C.R., Lambers, E., Craciun, V.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Hard coating
Physics
Pulsed laser deposition
TiN, ZrN
X-Ray diffraction
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Description
Summary:•TiN and ZrN films were grown by pulsed laser deposition.•XPS results indicated that films contain C atoms bonded into metallic carbide.•Films containing carbon exhibited higher hardness values. Very thin TiN and ZrN films (
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2013.10.095