Oxidation of the 8×8-reconstructed β-Si3N4(0001) surface: A photoemission study

•Thermal oxidation of the 8×8-reconstructed β-Si3N4(0001) surface has been carried out.•The spectroscopic characterization has been performed by angle resolved and core-level photoemission.•Evidence for the SiO surface bonding has been recorded.•The 8×8 reconstruction strongly reduces the number of...

Full description

Saved in:
Bibliographic Details
Published in:Applied surface science 2015-11, Vol.355, p.93-97
Main Authors: Flammini, R., Bellucci, A., Wiame, F., Belkhou, R., Carbone, M., Trucchi, D.M., Colonna, S., Ronci, F., Hajlaoui, M., Silly, M.G., Sirotti, F.
Format: Article
Language:English
Subjects:
ARPES
Nitridation
Oxidation
Resonance
Silicon nitride
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:•Thermal oxidation of the 8×8-reconstructed β-Si3N4(0001) surface has been carried out.•The spectroscopic characterization has been performed by angle resolved and core-level photoemission.•Evidence for the SiO surface bonding has been recorded.•The 8×8 reconstruction strongly reduces the number of dangling bonds of the nitride surface. The thermal oxidation of the β-Si3N4(0001)-8×8 surface has been carried out. The spectroscopic characterization has been performed by high resolution core-level and by angle-resolved photoemission spectroscopy. Our findings demonstrate that the surface shows a low but clear reactivity with oxygen. The known resonance ascribed to the 8×8 reconstruction results strongly affected by the oxygen dosing, demonstrating the involvement of the topmost nitride atoms.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2015.07.019