Surface resonance properties of pure Cu and Cu80Zr20 metallic glass films with nanoparticles induced by pulsed-laser dewetting process

• Published in: Applied surface science 2020-03, Vol.507, p.145185, Article 145185
• Main Authors: Lin, H.K., Wang, Y.T., Chuang, W.S., Chou, H.S., Huang, J.C.
• Format: Article
• Language: English
• Subjects: Metallic glass; Nanoparticle; Pulsed-laser dewetting; Surface resonance properties
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2019.145185

[Display omitted] •Pure Cu and Cu80Zr20 thin films were deposited on glass substrates.•Nanoparticles were induced by pulsed-laser dewetting process.•The particle size ranges from 56 nm to 168 nm and the absorption peak wavelengths fall within the range of 580–700 nm.•The dewetting mechanism for metallic glasses is different from that for metal thin films. Pure Cu and Cu80Zr20 thin films with a thickness of 10 nm were deposited on glass substrates using a high-vacuum sputtering system. A pulsed-laser dewetting process was then performed using a NIR laser system. For the pure Cu film, nanoparticles were produced for the accumulated energy (AE) densities in the range of 0.6–11 J/cm2. The particle size was found to increase with increasing scanning speed and repetition rate, and with decreasing power. For the Cu80Zr20 thin film, nanoparticles were formed under all AE values under consideration. The nanoparticles consisted almost entirely of Cu; with the Zr atoms being repelled to the bottom of the nanoparticle and surroundings. The optical absorption peak wavelengths for the Cu and Cu80Zr20 films produced under different dewetting conditions all lay in the range of 580–700 nm. Hence, it was inferred that the nanoparticles produced in the two films had a similar size, shape and composition.