Controllable preparation of single-crystal diamond nanopillar clusters by metal cyclic dewetting process

• Published in: Applied surface science 2023-01, Vol.609, p.155246, Article 155246
• Main Authors: Tan, Xin, He, Zhanqing, Yang, Qiao, Sun, Shiyang, Jia, Huiling, Ren, Yuan
• Format: Article
• Language: English
• Subjects: Copper film; Cyclic dewetting; Nanopillar clusters; Single crystal diamond
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2022.155246

[Display omitted] •Using microwave plasma chemical vapor deposition (MPCVD) and low-density crystal planting process to grow diamond single crystal particles with flat crystal surfaces.•The diameter and spacing of the nano-pillar etching mask were controlled by the cyclic dewetting process of copper film on the surface of diamond for the first time.•The prepared single crystal diamond nanopillars have a uniform diameter and dense arrangement, which can enhance the luminescence of diamond color centers. Diamond nanopillars can effectively improve the spontaneous emission efficiency and coupling-out efficiency of diamond-color-center single-photon sources. In this paper, a low-cost and controllable method for preparing diamond nanopillar clusters is proposed. By choosing the crystal planting method and adjusting the methane concentration of the grown diamonds, isolated single-crystal diamond particles with a flat surface were prepared. Etching masks with individually controllable diameters and spacings were prepared through the cyclic deposition and dewetting of metal films on the surface of microcrystalline diamond particles. Using inductively coupled reactive ion etching technology, diamond nanopillar clusters were prepared through oxygen plasma etching. The nanopillars were uniform in diameter and densely arranged. The single-crystal properties of the diamond nanopillars and their enhancement effect on the photoluminescence of diamond color centers were confirmed through the analysis of Raman and photoluminescence spectra. The results provide a foundation for the deviceization of diamond-color-center single-photon sources.