Effect of temperature on the growth of two-dimensional MoS2 on low-cost soda-lime glass

• Published in: Current applied physics 2024-01, Vol.57, p.1-7
• Main Authors: Gao, Qingguo, Chen, Simin, Huang, Wanying, Li, Jiabing, Cao, Tianfan, Zhang, Zhi, Chi, Feng, Liu, Ping
• Format: Article
• Language: English
• Subjects: Bilayer MoS2; Chemical vapor deposition; Glass; Molybdenum disulfide; Temperature
• ISSN: 1567-1739; 1878-1675
• DOI: 10.1016/j.cap.2023.10.010

In recent years, the growth of high-quality MoS2 on low-cost glass substrates has attracted extensive attention due to its advantages in terms of low cost, rapid growth rate, and excellent repeatability. In this study, we systematically investigated the effect of temperature on the CVD growth of high-quality MoS2 on low-cost glass substrates. Our experimental results show that increasing the growth temperature from 900 °C to 1050 °C in the region far from the molybdenum source results in high-quality large-domain MoS2 growth, with the domain size of triangular MoS2 increasing from 109 μm to 1.27 mm. Furthermore, in the region close to the molybdenum source, we obtained high-quality bilayer MoS2 films with a continuous region larger than 19 mm × 8 mm by increasing the growth temperature from 900 °C to 1050 °C. These results are significant for the cost-effective and high-quality synthesis of MoS2 and its potential industrial applications. [Display omitted] •This paper investigates the influence of temperature on the growth of MoS2 on glass substrates.•Increasing the growth temperature enhances the size of single-crystal MoS2 on glass substrates.•Increasing the growth temperature increases the continuous film area of bilayer MoS2 on glass substrates.•The gradient of Mo precursor has a significant impact on the growth of MoS2 on glass substrates.