Identification of carbon phases and analysis of diamond/substrate interfaces by Raman spectroscopy

Raman spectroscopy is employed to characterize thin diamond and diamond-like carbon films deposited by hot filament chemical vapour deposition (HFCVD). A method is proposed and experimentally verified for a contact-less measurement of the actual substrate temperature by Raman spectroscopy.

Saved in:
Bibliographic Details
Published in:Carbon (New York) 2005, Vol.43 (2), p.425-429
Main Authors: Kromka, A., Breza, J., Kadlečı́ková, M., Janı́k, J., Balon, F.
Format: Article
Language:English
Subjects:
A. Diamond, Diamond-like carbon
B. Chemical vapour deposition
C. Raman spectroscopy
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Fullerenes and related materials
diamonds, graphite
Materials science
Physics
Specific materials
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Raman spectroscopy is employed to characterize thin diamond and diamond-like carbon films deposited by hot filament chemical vapour deposition (HFCVD). A method is proposed and experimentally verified for a contact-less measurement of the actual substrate temperature by Raman spectroscopy.
ISSN:0008-6223
1873-3891
DOI:10.1016/j.carbon.2004.10.004