Fabrication, mechanical testing and application of high-pressure glass microreactor chips

The design, fabrication and high-pressure performance of several in-plane fiber-based interface geometries to microreactor chips for high-pressure chemistry are discussed, and an application is presented. The main investigated design parameters are the geometry of the inlet/outlet structure, the man...

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Bibliographic Details
Published in:Chemical engineering journal (Lausanne, Switzerland : 1996) Switzerland : 1996), 2007-07, Vol.131 (1), p.163-170
Main Authors: Tiggelaar, Roald M., Benito-López, Fernando, Hermes, Dorothee C., Rathgen, Helmut, Egberink, Richard J.M., Mugele, Frieder G., Reinhoudt, David N., van den Berg, Albert, Verboom, Willem, Gardeniers, Han J.G.E.
Format: Article
Language:English
Subjects:
Applied sciences
Chemical application
Chemical engineering
Exact sciences and technology
Fabrication
High-pressure
Mechanical testing
Microreactor
Reactors
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Summary:The design, fabrication and high-pressure performance of several in-plane fiber-based interface geometries to microreactor chips for high-pressure chemistry are discussed, and an application is presented. The main investigated design parameters are the geometry of the inlet/outlet structure, the manner in which top and bottom wafer are bonded and the way the inlets/outlets turn over into the microfluidic channels. Destructive pressure experiments with H 2O and liquid CO 2 showed that the maximum pressure that the proposed inlet/outlet structures can withstand is in the range of 180–690 bar. The optimal geometry for high-pressure microreactor chips is a tubular structure that is etched with hydrofluoric acid (HF) and suitable for fibers with a diameter of 110 μm. These inlets/outlets can withstand pressures up to 690 bar. On the other hand, small powderblasted inlets/outlets that are smoothened with HF and with a sharp transition towards the flow channels are adequate for working pressures up to 300 bar. Microreactor chips with tubular inlet/outlet geometries were used for studying the formation of the carbamic acid of N-benzylmethylamine and CO 2. These chips could be used for pressures up to 400 bar without problems/failure, thereby showing that these micromachined microreactor chips are attractive tools for performing high-pressure chemistry in a fast and safe way.
ISSN:1385-8947
1873-3212
DOI:10.1016/j.cej.2006.12.036