Fast liquid-free patterning of SWCNT films for electronic and optical applications

• Published in: Chemical engineering journal (Lausanne, Switzerland : 1996) Switzerland : 1996), 2024-04, Vol.485, p.149733, Article 149733
• Main Authors: Novikov, Ilya V., Raginov, Nikita I., Krasnikov, Dmitry V., Zhukov, Sergey S., Zhivetev, Kirill V., Terentiev, Andrii V., Ilatovskii, Daniil A., Elakshar, Aly, Khabushev, Eldar M., Grebenko, Artem K., Kuznetsov, Sergei A., Shandakov, Sergey D., Gorshunov, Boris P., Nasibulin, Albert G.
• Format: Article
• Language: English
• Subjects: Aerosol CVD synthesis; Patterning; Rational design; Single-walled carbon nanotubes; THz optics; Transparent conductive films
• ISSN: 1385-8947
• DOI: 10.1016/j.cej.2024.149733

[Display omitted] •A new fast and liquid-free method for patterning SWCNT films was developed.•Patterned SWCNT films were obtained by selective filtration in aerosol CVD method.•Reusable flow mask prepared by sputtering on membrane selectively filters CNT flow.•Patterned films show a 12-fold improvement in transparent electrode performance.•Transferred onto elastomer, SWCNT meshes worked as tunable diffraction gratings. The development of new approaches to assembling carbon nanotubes in next-level architecture organization is one of the key directions in Nanomaterials Science. Meanwhile, the recent advances in the so-called rational design of thin single-walled carbon nanotube (SWCNT) films promise a significant improvement in the performance of electronic and optical devices. In this study, we propose a fast, efficient, and green method for the fabrication of 2D patterned SWCNT structures. This technique is based on the selective area deposition of SWCNTs synthesized in the aerosol (floating catalyst) CVD process. Such a liquid-free and one-step process beneficially distinguishes from existing alternative methods based on lithography on the filter or post-treatment lithography on already synthesized continuous films. We demonstrate a 12-fold improvement in the performance of patterned mesh-shaped SWCNT films used as transparent electrodes when compared to the continuous film. As a result, the sheet resistance at an overall 90 % transparency in the visible light range value of 62 Ω/□ was achieved. Moreover, transferred onto elastomer, the mesh-shaped SWCNT films were efficiently applied as tunable diffraction gratings in the THz range. We believe the technique proposed extends the possibilities of the aerosol CVD process for utilization in various applications.