Si and N incorporated hydrogenated diamond like carbon film with excellent performance for marine corrosion resistance

Under the background of the development of marine resources, marine corrosion has become a focus problem. A series of Si and N incorporated hydrogenated diamond like carbon (SiN-HDLC) film with excellent corrosion resistance performance was deposited by plasma enhanced chemical vapor deposition. Res...

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Bibliographic Details
Published in:Ceramics international 2022-03, Vol.48 (6), p.8440-8450
Main Authors: Wei, Xubing, Ning, Chuangming, Lu, Zhibin, Zhang, Guangan
Format: Article
Language:English
Subjects:
Corrosion mechanism
HDLC films
Marine corrosion
PECVD
Si and N incorporated
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Summary:Under the background of the development of marine resources, marine corrosion has become a focus problem. A series of Si and N incorporated hydrogenated diamond like carbon (SiN-HDLC) film with excellent corrosion resistance performance was deposited by plasma enhanced chemical vapor deposition. Results suggest that the sp3/sp2 ratio of SiN-HDLC films presents a trend of increasing first and then decreasing with the improvement of the N2/SiH4 ratio. The adhesion between the as-deposited HDLC film and the substrate is tight (no microcracks) and the film surface is uniform and compact. The potentiodynamic polarization and electrochemical impedance spectroscopy results indicate that the SiN-HDLC film possesses better corrosion resistance in artificial seawater than that of Si-HDLC and N-HDLC film, and is much better than 304SS substrate. Besides, the SiN-HDLC film with the N2/SiH4 of 1/1 shows the best corrosion resistance. The as-deposited SiN-HDLC film possesses more excellent corrosion resistance in the artificial seawater environment compared with the reported DLC films and this study provides a promising protective material for marine corrosion resistance.
ISSN:0272-8842
1873-3956
DOI:10.1016/j.ceramint.2021.12.052