Enhanced selective ammonia detection of spray deposited Cd-doped β-Ga2O3 thin films with low hysteresis effect

The Ga2O3 thin films at different concentrations (at %) of Cd dopant were deposited using spray pyrolysis technique. The X-ray diffraction patterns revealed Cd-doped β-Ga2O3 thin film are in monoclinic crystal structure with (2 0 1) orientation. Atomic force micrographs depict the change in morpholo...

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Bibliographic Details
Published in:Ceramics international 2022-10, Vol.48 (19), p.29067-29080
Main Authors: Pandeeswari, R., Jeyaprakash, B.G., Veluswamy, Pandiyarasan, Balamurugan, D.
Format: Article
Language:English
Subjects:
Ammonia
Dopant
Gallium oxide
Nanograins
Sensing response
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Summary:The Ga2O3 thin films at different concentrations (at %) of Cd dopant were deposited using spray pyrolysis technique. The X-ray diffraction patterns revealed Cd-doped β-Ga2O3 thin film are in monoclinic crystal structure with (2 0 1) orientation. Atomic force micrographs depict the change in morphology upon Cd dopant. At ambient temperature (∼30 °C), the results of ammonia sensing measurements of 4 at % Cd-doped Ga2O3 thin films point out the low-level detection (0.5 ppm) of ammonia with good sensing response (233 %), higher sensitivity (26 Ω/m), fast response-recovery time (3 s and 14 s), better selectivity, low hysteresis, and higher stability. Maiden report of spray deposited Cd-doped β-Ga2O3 thin films shows selective detection and greater sensing response (S = 233%) towards ammonia vapour (0.5 ppm) by chemi-resistive method. [Display omitted]
ISSN:0272-8842
1873-3956
DOI:10.1016/j.ceramint.2022.04.303