Similarity searching for fault diagnosis of defect patterns in wafer bin maps

Saved in:
Bibliographic Details
Published in:Computers & industrial engineering 2023-11, Vol.185, p.109679, Article 109679
Main Authors: Wang, Rui, Wang, Songhao
Format: Article
Language:English
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0360-8352
DOI:10.1016/j.cie.2023.109679