Dimensional Micro and Nano Metrology

The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient. Major research and development efforts have to be undertaken in order to answer these challen...

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Bibliographic Details
Published in:CIRP annals 2006, Vol.55 (2), p.721-743
Main Authors: Hansen, H.N., Carneiro, K., Haitjema, H., De Chiffre, L.
Format: Article
Language:English
Subjects:
Applied sciences
Dimensional metrology
Exact sciences and technology
Industrial metrology. Testing
Mechanical engineering. Machine design
Micro technology
Nano technology
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Summary:The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient. Major research and development efforts have to be undertaken in order to answer these challenges. The developments have to include new measuring principles and instrumentation, tolerancing rules and procedures as well as traceability and calibration. The current paper describes issues and challenges in dimensional micro and nano metrology by reviewing typical measurement tasks and available instrumentation. Traceability and calibration issues are discussed subsequently. Finally needs and gaps are identified based on these observations.
ISSN:0007-8506
DOI:10.1016/j.cirp.2006.10.005