Development of ultra-precision machining system with unique wire EDM tool fabrication system for micro/nano-machining

Aiming at quality machining of very hard materials with nanometer level surface quality and 0.1 μm dimensional accuracy, an ultra-precision machining system has been developed. The machine has feed axes accompanied by the counter motion mechanism driven at the center of gravity to eliminate the vibr...

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Bibliographic Details
Published in:CIRP annals 2008, Vol.57 (1), p.415-420
Main Authors: Cheng, X., Nakamoto, K., Sugai, M., Matsumoto, S., Wang, Z.G., Yamazaki, K.
Format: Article
Language:English
Subjects:
Applied sciences
Ductile mode micromachining
Exact sciences and technology
Mechanical engineering. Machine design
Precision engineering, watch making
Ultra-precision machine tool
Wire EDM
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Summary:Aiming at quality machining of very hard materials with nanometer level surface quality and 0.1 μm dimensional accuracy, an ultra-precision machining system has been developed. The machine has feed axes accompanied by the counter motion mechanism driven at the center of gravity to eliminate the vibration caused by high acceleration/deceleration. A custom tool fabrication system consists of a 6-axis wire EDM machine and dedicated custom tool CAM system. High quality machining of sophisticated three-dimensional (3D) products made of tungsten carbide has successfully been demonstrated on the developed machine tool with custom-made PCD cutters fabricated by the tool fabrication system.
ISSN:0007-8506
DOI:10.1016/j.cirp.2008.03.137