Fabrication of TiN inverse opal structure and Pt nanoparticles by atomic layer deposition for proton exchange membrane fuel cell

• Published in: International journal of hydrogen energy 2017-04, Vol.42 (15), p.10175-10183
• Main Authors: Liu, Yoh-Rong, Hsueh, Yang-Chih, Perng, Tsong-Pyng
• Format: Article
• Language: English
• Subjects: Atomic layer deposition; Inverse opal; Platinum; Proton exchange membrane fuel cell; Titanium nitride; Titanium oxide
• ISSN: 0360-3199; 1879-3487
• DOI: 10.1016/j.ijhydene.2017.03.098

A titanium nitride (TiN) inverse opal structure was fabricated on carbon paper as a support of Pt for application in proton exchange membrane fuel cell (PEMFC). Polystyrene spheres with different diameters were coated on carbon paper by spin coating in multilayers as a template. Titanium dioxide (TiO2) thin film was then deposited on the template by atomic layer deposition (ALD). The TiN inverse opal structure was fabricated by direct nitridation of TiO2 in flowing ammonia atmosphere at above 800 °C. Platinum nanoparticles were then deposited uniformly on TiN by ALD. The performances of PEMFC using Pt@TiN@carbon paper composite as electrodes were examined. The homemade electrodes showed at least 13 times higher platinum specific power density than commercial E-Tek electrodes. [Display omitted] •A TiN inverse opal structure was formed on carbon paper as a support for Pt catalyst.•It was achieved by depositing TiO2 on PS spheres by ALD and subsequent nitridation.•Pt nanoparticles were uniformly deposited on TiN also by ALD.•The Pt@TiN@CP exhibited much higher platinum specific PEMFC power density than E-Tek.