Gas sensing nature and characterization of Zr doped TiO2 films prepared by automated nebulizer spray pyrolysis technique

• Published in: Optik (Stuttgart) 2020-03, Vol.206, p.164347, Article 164347
• Main Authors: V., Gopala Krishnan, N., Ravikumar, Dilip R., P., Elango
• Format: Article
• Language: English
• Subjects: Automated nebulizer spray pyrolysis method; Optical study and gas sensing behavior; Structural study
• ISSN: 0030-4026; 1618-1336
• DOI: 10.1016/j.ijleo.2020.164347

•ANSP technique used for prepare the ZrxTi1-xO2 nanofilms.•XRD, XPS studies are confirms the anatase phase tetragonal crystal structure (Ti4+).•FESEM study shows the compact granular spherical structure.•NH3 shows better sensing response among the gases of CH4, C2H6O, C3H6O, C3H8O. This paper investigates the Zr doped TiO2 films deposited by automated nebulizer spray pyrolysis (ANSP) technique at 500 ºC as coating temperature. The manipulation of Ti/Zr ratio on XRD study shows the stabilized anatase tetragonal crystal structure in all deposited films, and the XPS study shows C 1s, Ti 2p, Zr 3d and O 1s are spin orbits of the relative elements. The surface morphological study of FESEM shows the compact granular spherical structure for all the Zr doped TiO2 films. The optical study reveals the blue-shift of band gap energy Eg = 3.20 eV to 3.64 eV with respect to dopant (Zr). Gas sensitivity response of all films exhibits the better response to NH3 reducing gas among the other gas (C2H6O, C3H6O, CH4O, C3H8O) with a function of constant temperature (ºC) and gas concentration (ppm).