TEM studies on the changes of the composition in LGS and CTGS substrates covered with a RuAl metallization and on the phase formation within the RuAl film after heat treatment at 600 and 800 °C

• Published in: Journal of alloys and compounds 2016-04, Vol.664, p.510-517
• Main Authors: Seifert, Marietta, Rane, Gayatri K., Menzel, Siegfried B., Gemming, Thomas
• Format: Article
• Language: English
• Subjects: High-temperature alloys; Microstructure; TEM; Thin films; Transmission electron microscopy
• ISSN: 0925-8388; 1873-4669
• DOI: 10.1016/j.jallcom.2015.12.185

A detailed transmission electron microscopy analysis of LGS and CTGS substrates which are covered with RuAl thin films is performed after annealing the system at 600 and 800 °C for 10 h under high vacuum conditions. Energy dispersive X-ray spectroscopy is applied to reveal the changes of the chemical composition of the substrates as well as of the metallization. While after annealing at 600 °C hardly any changes occur in the films and in the substrate, huge inhomogeneities are found within the substrates after annealing at 800 °C and a strong oxidation occurs within the RuAl films. [Display omitted] •Investigation of the thermal stability of RuAl thin films on LGS and CTGS.•The RuAl phase is stable on LGS and CTGS up to 600 °C in vacuum.•Annealing at 800 °C leads to complete oxidation of the Al on LGS and partly on CTGS.•TEM analysis shows local inhomogeneities within the 800 °C heated LGS substrate.•The upper 50–100 nm of the 800 °C heated CTGS substrate is completely inhomogeneous.