Modeling and simulation of AlN bulk sublimation growth systems

In this paper, we have developed a numerical model to simulate two AlN sublimation growth systems. Temperature distributions in the growth cell for resistance and induction heating systems are presented and compared. The growth rate has been predicted and compared with experimental data. An anisotro...

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Bibliographic Details
Published in:Journal of crystal growth 2004-05, Vol.266 (1), p.303-312
Main Authors: Wu, Bei, Ma, Ronghui, Zhang, Hui, Prasad, Vish
Format: Article
Language:English
Subjects:
A1. Computer simulation
A1. Growth models
A2. Growth from vapor
A2. Single crystal growth
A3. Chemical vapor deposition processes
B1. Nitrides
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Growth from vapor
Materials science
Methods of crystal growth
physics of crystal growth
Physics
Theory and models of crystal growth
physics of crystal growth, crystal morphology and orientation
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Summary:In this paper, we have developed a numerical model to simulate two AlN sublimation growth systems. Temperature distributions in the growth cell for resistance and induction heating systems are presented and compared. The growth rate has been predicted and compared with experimental data. An anisotropic thermomechanical stress model is also developed to predict the thermal stress distribution in the as-grown crystal, with or without contact with the crucible wall.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2004.02.059