Numerical study of continuous Czochralski (CCz) silicon single crystal growth in a double-side heater

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Bibliographic Details
Published in:Journal of crystal growth 2024-01, Vol.626, p.127488, Article 127488
Main Authors: Nguyen, Thi-Hoai-Thu, Chen, Jyh-Chen
Format: Article
Language:English
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ISSN:0022-0248
DOI:10.1016/j.jcrysgro.2023.127488