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Numerical study of continuous Czochralski (CCz) silicon single crystal growth in a double-side heater
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Published in: | Journal of crystal growth 2024-01, Vol.626, p.127488, Article 127488 |
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Language: | English |
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container_start_page | 127488 |
container_title | Journal of crystal growth |
container_volume | 626 |
creator | Nguyen, Thi-Hoai-Thu Chen, Jyh-Chen |
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doi_str_mv | 10.1016/j.jcrysgro.2023.127488 |
format | article |
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language | eng |
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source | ScienceDirect Journals |
title | Numerical study of continuous Czochralski (CCz) silicon single crystal growth in a double-side heater |
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