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Infrared electroluminescence from erbium-doped spark-processed silicon
The infrared (IR) electroluminescence (EL) of erbium-doped spark-processed silicon (sp-Si) was investigated. For this, a device was constructed which consisted of a silicon wafer on which an erbium layer was vapor deposited, followed by spark-processing and rapid thermal annealing for 15 min at 900...
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Published in: | Journal of luminescence 2007-12, Vol.127 (2), p.339-348 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | The infrared (IR) electroluminescence (EL) of erbium-doped spark-processed silicon (sp-Si) was investigated. For this, a device was constructed which consisted of a silicon wafer on which an erbium layer was vapor deposited, followed by spark-processing and rapid thermal annealing for 15
min at 900
°C in air. The metallization consisted of a 200
nm Ag layer (above the spark-processed area) and a 50
nm thick Al film (on the “back side”), containing a window through which the light could escape. Maximal light emission occurred near 1.55
μm, that is, at a wavelength where commonly used fiber optical materials have their minimum in energy loss. The processing parameters for most efficient light emission were an Er thickness of 200–300
nm, a spark-processing time of about 30
s, an n-type Si wafer having a low (3–5
Ω
cm) resistivity, an operating temperature near room temperature, and an operating voltage between 25 and 40
V under reverse bias. The results are interpreted by postulating an energy transfer from sp-Si to the Er
3+ ions involving the first excited state
4I
13/2 to ground state
4I
15/2. Further, impact excitation and hot electrons that are accelerated into the erbium doped sp-Si by the applied field (100
kV/cm) are considered. |
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ISSN: | 0022-2313 1872-7883 |
DOI: | 10.1016/j.jlumin.2006.12.009 |