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Structural and photoluminescence properties of Si nanoclusters obtained by ion implantation into Si3N4 films
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Published in: | Journal of luminescence 2011-11, Vol.131 (11), p.2377-2381 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0022-2313 1872-7883 |
DOI: | 10.1016/j.jlumin.2011.05.066 |