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Structural and photoluminescence properties of Si nanoclusters obtained by ion implantation into Si3N4 films

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Bibliographic Details
Published in:Journal of luminescence 2011-11, Vol.131 (11), p.2377-2381
Main Authors: BREGOLIN, F. L, BEHAR, M, SIAS, U. S, MOREIRA, E. C
Format: Article
Language:English
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ISSN:0022-2313
1872-7883
DOI:10.1016/j.jlumin.2011.05.066