Influence of total film thickness on high-frequency magnetic properties of the [FeCoSiN/SiNx]n multilayer thin films

• Published in: Journal of magnetism and magnetic materials 2015-01, Vol.374, p.85-91
• Main Authors: Liu, X.L., Wang, L.S., Xu, R., Luo, Q., Xu, L., Yuan, B.B., Zou, C.Y., Wang, J.B., Peng, D.L.
• Format: Article
• Language: English
• Subjects: High-frequency magnetic property; In-plane uniaxial magnetic anisotropy; Multilayer film; Soft magnetic film
• ISSN: 0304-8853
• DOI: 10.1016/j.jmmm.2014.08.028

[FeCoSiN/SiNx]n multilayer thin films with different number of layers were fabricated by alternating magnetron sputtering at room temperature with no external magnetic field applied on substrates. A well-defined laminated structure consisting of 7nm FeCoSiN magnetic layer and 2nm SiNx insulating layer was observed by transmission electron microscopy (TEM). The static magnetic hysteresis loops of the [FeCoSiN/SiNx]n multilayer thin films measured by vibrating sample magnetometer (VSM) presented an obvious in-plane uniaxial magnetic anisotropy. The dynamic magnetic performance of the [FeCoSiN/SiNx]n multilayer films was studied by vector network analyzer and LLG equation. The results indicated that the total film thickness has slightly impact on the high-frequency magnetic performance of the multilayer thin films. When the total thickness of the [FeCoSiN/SiNx]n multilayer thin films increased to micron level, they could still maintain encouraging high-frequency magnetic properties and electrical property: the ferromagnetic resonance frequency fr=3.74GHz, real permeability µ′=93.73, and electrical resistivity ρ=196µΩcm. •The [FeCoSiN/SiNx]n multilayer thin films were prepared by magnetron sputtering.•The influence of total film thickness on high-frequency properties was studied.•The multilayer thin films exhibited excellent high-frequency properties.