Tailoring the in-plane magnetic anisotropy and permeability spectra of obliquely deposited Fe40Co40B20 films for 5G communications

•Oblique sputtering deposition induces in-plane magnetic anisotropy in FeCoB films.•Magnetic anisotropy increases the resonant frequency of permeability spectra.•Oblique sputtering deposition enhances the figure of merit for 5G communications. Ferromagnetic films are widely used in magnetic devices...

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Bibliographic Details
Published in:Journal of magnetism and magnetic materials 2023-07, Vol.578, p.170811, Article 170811
Main Authors: Li, Qifan, Jiang, Yunchuan, Wu, Chuanjian, Jiang, Xiaona, Li, Ziyu, Sun, Ke, Lan, Zhongwen, Yu, Zhong
Format: Article
Language:English
Subjects:
Columnar grains
Ferromagnetic films
Magnetic anisotropy
Oblique deposition
Permeability spectra
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Summary:•Oblique sputtering deposition induces in-plane magnetic anisotropy in FeCoB films.•Magnetic anisotropy increases the resonant frequency of permeability spectra.•Oblique sputtering deposition enhances the figure of merit for 5G communications. Ferromagnetic films are widely used in magnetic devices owing to their high saturation magnetization, high magnetic permeability, and low coercivity. However, it is extremely challenging to apply ferromagnetic films to high-frequency communication applications due to the low resonant frequency of permeability spectra. Here, ferromagnetic Fe40Co40B20 films are prepared using oblique magnetron sputtering deposition and the static and dynamic magnetic properties are comprehensively investigated. The self-shadowing effect caused by the tilted growth of columnar grains introduces in-plane magnetic anisotropy to the films, thereby increasing the natural resonant frequency. As the sputtering angle increases from 24° to 30°, the resonant frequency increases from 4.09 to 4.87 GHz, resulting in an approximate liner tunability of 0.13 GHz/degree. Compared to the normally sputtered films, the figure of merit in regard to the microwave magnetic performance of the obliquely sputtered films is significantly enhanced by more than 50%. These results reveal the effectiveness of the oblique sputtering deposition to tailor the in-plane magnetic anisotropy and permeability spectra of ferromagnetic films for the high-frequency film inductor application of 5G communications.
ISSN:0304-8853
DOI:10.1016/j.jmmm.2023.170811