A change of photoinduced dilation of a-Si:H by cyanide treatment

Effects of cyanide treatment on photoinduced dilation in hydrogenated amorphous silicon (a-Si:H) films have been investigated. The magnitude of the photoinduced dilation Δ V/ V in a film treated with cyanide solutions decreased by 10% compared with that of an as-deposited film. And, the Δ V/ V becom...

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Bibliographic Details
Published in:Journal of non-crystalline solids 2004-06, Vol.338, p.365-368
Main Authors: Sobajima, Y., Mori, K., Tsukamoto, M., Kamiguchi, H., Yoshida, N., Kobayashi, H., Nonomura, S.
Format: Article
Language:English
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Summary:Effects of cyanide treatment on photoinduced dilation in hydrogenated amorphous silicon (a-Si:H) films have been investigated. The magnitude of the photoinduced dilation Δ V/ V in a film treated with cyanide solutions decreased by 10% compared with that of an as-deposited film. And, the Δ V/ V becomes about a half in a thermal annealed film with the cyanide solutions. These results are discussed from view points of effects of cyanide treatment and oxidization of a-Si:H films.
ISSN:0022-3093
1873-4812
DOI:10.1016/j.jnoncrysol.2004.02.075